Remarkably Volatile Copper(Ⅱ) Complexes of N, N′-Unsymmetrically Substituted 1,3-Diketimines as Precursors for Cu Metal Deposition via CVD or ALD

摘要

A variety of Cu(Ⅱ) (N,N′-unsymmetrically substituted 1,3-diketiminate) complexes have been synthesized and have proven qualitatively to be much more volatile than their symmetrical counterparts. We plan to disclose in a full paper more quantitative relationship data between volatility and Cu complexes' symmetry by determining its enthalpy of vaporization at several temperatures soon.