Voxel Primitive Based Modeling and Simulating Method for Surface Micromachining Technology

摘要

To avoid the traditional inefficient mask-beginning design way of micro device, feature technology was introduced into the modeling method. However, the hindrance to the mapping process from the feature-based 3D model to the fabricating information is hardly to exclude without a reasonable way to make the model conform to the fabricating processes. For surface micromachining, the voxel primitive based modeling method is proposed to efficiently construct the 3D model. The primitives compose the features that have relationship with the upper levels of the design flow. Moreover, the primitives can be stored in library because of the parametric and reusable character. With respect to the fabrication, the simulation technology is presented, which is the fabricating-oriented revising procedure to ensure the manufacturability. Based on JAVA technology, the key algorithms are developed to implement the primitive-based modeling kernel and the fabricating processes simulation. With the proposed method, the micro device model is constructed more conveniently with the improvement of manufacturability.