Characteristics of Silicon Dioxide Particles in PCVD Synthesizing Silica Glass Process

摘要

SiO_2 nanoparticles in PCVD process were investigated by SEM, TEM, and optical emission spectra (OES). There are large spherical SiO_2 particles with diameter of 50-200 nm and more small particles about 10-50 nm in PCVD process. Size of SiO_2 particles is influenced by distance and feeding speed but not electron temperature. The amount of large spherical SiO_2 particles decreases with the increase of distance and decrease of feeding speed due to lower concentration. In addition, the evolution of SiO_2 particles was inferred from the experimental results.