Fabrication of giant magneto resistance sensing devices with vertically grown Co/Cu nanowires on a substrate

摘要

We describe the fabrication and analysis of a giant magnetonresistance u0001GMRu0002 sensing device with multilayered magnetic nanowiresncontaining alternating ferromagnetic and nonmagnetic layers on a siliconnsubstrate. Multilayered nanowires with Co and Cu layers were verticallyngrown using pulsed electrochemical deposition to control the periodicnstructure of nanolayers in a nanopore template. Lithography-assistedntemplate bonding u0001LATBu0002 was applied to attach a polymer nanoporenmembrane and grow nanowires on silicon and polyimide substrates. Fornmagnetic field sensing, the multilayered nanowires were electrically con-nnected to top and bottom electrodes by overgrowing nanowires, and lowncontact resistance values of GMR sensing devices were achieved. ThenGMR effect was measured with magnetic field changes perpendicularnand parallel to the axis of the nanowires. This simple fabrication processnis highly favorable for the development of nanoscale electronics withnmagnetic nanowires at low cost and would offer large design flexibility