Orientation Zernike polynomials: a useful way to describe the polarization effects of optical imaging systems

摘要

We introduce the new concept of orientation Zernike polyno-nmials, a base function representation of retardation and diattenuation innclose analogy to the wavefront description by scalar Zernike polynomi-nals. We show that the orientation Zernike polynomials provide a com-nplete and systematic description of vector imaging using high numericalnaperture lithography lenses and, hence, a basis for an in depth under-nstanding of both polarized and unpolarized imaging, and its modeling