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首页> 外文期刊>Journal of microanolithography, MEMS, and MOEMS >Fabrication And Testing Of Finite Aperture Polarizers For Determination Of Edge Termination Effects On Polarimetric Imaging Applications At Midwave Infrared
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Fabrication And Testing Of Finite Aperture Polarizers For Determination Of Edge Termination Effects On Polarimetric Imaging Applications At Midwave Infrared

机译:有限孔径偏振器的制造和测试,以确定在中波红外下偏振成像应用中的边缘终止效应

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摘要

Polarimetric imaging applications at the 2-to-5-μm or mid-wave infrared range use large pixel-count focal plane arrays (FPAs) with small pixel sizes. We report on the design, fabrication, and characterization of micropolarizers for the 2-to-5-μm regime. These micropolarizers will be used in conjunction with a FPA and will be in the near field of the imaging device. The pixel pitches for some commercial FPAs are small enough that the finite apertures of the polarizing devices may significantly affect their performance, because their aperture dimension varies between three and five waves. We are interested in understanding the effect on the extinction ratio due to variations in the edge terminations of a polarizer with a small aperture. Edge terminations are the spaces between the first and last wire with the perimeter of the aperture of the polarizer. To verify these effects, we fabricated micropolarizers with apertures of 5 to 20 μm and with termination edge spaces of one-quarter and three-quarters of the wiregrids period. The devices measured extinction ratios from 50:1 for the smallest aperture to 200:1 for the largest. Simulations and measurements show that the extinction ratio is larger forrnthe smaller termination edge spacing.
机译:在2至5μm或中波红外范围内的偏振成像应用程序使用具有小像素尺寸的大像素计数焦平面阵列(FPA)。我们报告了2到5微米制程的微偏振器的设计,制造和表征。这些微偏振器将与FPA结合使用,并且将在成像设备的近场中使用。一些商用FPA的像素间距足够小,以至于偏振设备的有限孔径可能会显着影响其性能,因为它们的孔径尺寸会在三波和五波之间变化。我们有兴趣了解由于孔径较小的偏振片的边缘端接变化而对消光比的影响。边缘终端是第一根和最后一根导线之间的空间,其偏振器的孔径为周长。为了验证这些效果,我们制造了孔径为5至20μm,端接边缘空间为线栅周期的四分之一和四分之三的微偏振器。这些设备的消光比从最小孔径的50:1到最大孔径的200:1。仿真和测量结果表明,随着终止边缘间距的减小,消光比越大。

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