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机译:评估用于FinFET制造过程监控的临界尺寸小角X射线散射测量方法
State University of New York College of Nanoscale Science and Engineering, Albany, New York 12203, United States,Sematech, Albany, New York 12203, United States;
Sematech, Albany, New York 12203, United States;
Sematech, Albany, New York 12203, United States;
GlobalFoundries, Technology Development, Malta, New York 12020, United States;
GlobalFoundries, Technology Research, Albany, New York 12203, United States;
GlobalFoundries, Technology Research, Albany, New York 12203, United States;
GlobalFoundries, Technology Research, Albany, New York 12203, United States;
State University of New York College of Nanoscale Science and Engineering, Albany, New York 12203, United States;
critical dimension small-angle x-ray scattering; small angle x-ray scattering; critical dimension atomic force microscopy; atomic force microscopy; sidewall roughness; FinFET; lithography; double patterning; critical dimension metrology;
机译:在黎明2中加工二维X射线衍射和小角度散射数据
机译:SAXSANA:交互式程序,用于分析和监视静态和时间分辨的小角度X射线溶液散射测量
机译:从FTIR和广角/小角X射线散射的温度相关和时间分辨的测量结果来看,从玻璃或聚(l-乳酸)的熔融物中结晶过程中的结构规则化
机译:FinFET和3D存储器结构的临界尺寸小角X射线散射测量
机译:先进半导体制造的临界尺寸小角X射线散射计量学评估。
机译:在DAWN 2中处理二维X射线衍射和小角度散射数据
机译:小角X射线散射(萨克斯),超小角X射线散射(USAX),波动X射线散射(FXS),广角X射线散射(蜡),放牧发生小角度x - 射线散射(吉即),放牧入射广角X射线散射(Giwaxs),小角度中子散射(SAN),放牧发生小角度中子散射(Gisans),X射线衍射(XRD),粉末X射线衍射(PXRD),广角X射线衍射(WAXD),放牧发病X射线衍射(GIXD)和能量分散X射线衍射(EDXRD)对恶性和良性人体癌细胞的比较研究和同步辐射下的组织