机译:使用在线参考计量的验证计量系统
Toshiba Corporation, Analysis Inspection and Metrology Engineering Department, Yamanoisshiki-Cho, Yokkaichi 512-8550, Japan;
Toshiba Corporation, Analysis Inspection and Metrology Engineering Department, Yamanoisshiki-Cho, Yokkaichi 512-8550, Japan;
Toshiba Corporation, Analysis Inspection and Metrology Engineering Department, Yamanoisshiki-Cho, Yokkaichi 512-8550, Japan;
Toshiba Corporation, Analysis Inspection and Metrology Engineering Department, Yamanoisshiki-Cho, Yokkaichi 512-8550, Japan;
Toshiba Corporation, Center for Semiconductor Research & Development, Komukai-Toshiba-Cho, Saiwai-Ku, Kawasaki 212-8583, Japan;
Toshiba Corporation, Analysis Inspection and Metrology Engineering Department, Yamanoisshiki-Cho, Yokkaichi 512-8550, Japan;
reference metrology; measurement uncertainty; process variation; measurement robustness; grazing-incidence small- angle x-ray scattering;
机译:对在线临界尺寸度量的散射测量和扫描电子显微镜度量中的生产者和消费者风险的评估
机译:使用激光跟踪仪作为参考设备和索引计量平台的铰接臂坐标测量机的验证
机译:徕卡地球系统计量学部门整合到六角形计量学中
机译:使用在线参考计量的验证计量系统
机译:用于量子信息处理和增强计量的固态基旋转系统的高效旋转光子界面
机译:用于大规模计量的新型机器人集成条纹投影3D扫描系统的开发和验证
机译:使用内联参考计量验证计量系统
机译:BIpm / IaU空间参考系统和计量相对论联合委员会的报告