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机译:基于非参数核回归的基于像素的快速光学邻近校正
Beijing Institute of Technology, Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optoelectronics, 5 South ZhongGuanCun Street, Beijing 100081, China;
Beijing Institute of Technology, Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optoelectronics, 5 South ZhongGuanCun Street, Beijing 100081, China;
Beijing Institute of Technology, Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optoelectronics, 5 South ZhongGuanCun Street, Beijing 100081, China;
University of California at Berkeley, Department of Electrical Engineering and Computer Sciences, Berkeley, California 94706, United States;
Beijing Institute of Technology, Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optoelectronics, 5 South ZhongGuanCun Street, Beijing 100081, China;
lithography; resolution enhancement technique; optical proximity correction; nonparametric kernel regression; machine learning;
机译:基于光学邻近效应校正的受限光学邻近效应校正模式生成-基于模型的光学邻近效应校正中的可制造性规则设计
机译:近场光刻中的光学接近校正(OPC),具有基于像素的场切片时间调制
机译:对“基于快速网络智能像素的光互连原型的描述和评估”的更正
机译:带v支持向量回归的基于规则的光学邻近校正
机译:快速准确的光刻模拟和光学接近度校正,可用于制造的纳米设计
机译:LNQD序列下基于线性过程误差的非参数回归模型的加权核估计的Berry-Esseen界
机译:反向光刻作为DFm工具:利用基于模型的辅助特征放置,快速光学邻近校正和光刻热点检测加速设计规则开发
机译:基于谱逻辑的超快全光误差检测与校正电路