In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs

摘要

This work proposes an architecture for a wide-angle, self-aligned, in-plane monolithic scanner fabricated using the deep reactive ion etching technology. The fabricated microscanner provides an optical scanning in-plane angle of about 86 deg and operates at the speed of 2.73 kHz. The scanning is achieved using two synchronized, flat mirrors coupled mechanically to allow for wide-angle scanning and connected through a compliant structure to allow the use of a linear comb actuator. This wide-angle, in-plane scanning opens the door for many applications, especially for handheld optical displays.