Capillary force actuation

摘要

Microactuators based upon the alteration of the capillary pressure within a conducting liquid bridge via the application of electric potential are investigated. The physical principles of actuation are elucidated and the equations expressing bridge shape and force produced as a function of applied voltage are developed. It is shown that capillary force actuators are capable of achieving significant greater forces at lower voltage than electrostatic actuators. Charts for the design of actuators are presented. A comparison to electrostatic actuation provides a novel perspective on the mechanism of capillary force actuation. A simplified model of the actuator is also developed.