Electrical characteristics of ZrN metallised metal-oxide-semiconductor and metal-insulator-metal devices

摘要

The electrical properties of DC reactive sputtered zirconium-nitride metallized metal-oxide-semiconductor (MOS) and metal-insulator-metal (MIM) devices on TiO2/p-Si and TiO2/ZrN films were studied using capacitance-voltage (C-V) and current-voltage (I-V) measurements at room temperature. Capacitances of the ZrN/TiO2/p-Si MOS device were measured in accumulation mode and inversion mode, from which flat band capacitance was found to be 2.86pF, which corresponds to flat band voltage of -1.7 V. Fixed oxide charged density and interface state density was found to be 1.63x 10(10) cm(-2) and 6.3x 10(11) cm(-2) eV(-1). I-V characteristics revealed that the leakage current density was of 0.5 mA/cm(2) in accumulation mode and 2 mA/cm(2) in inversion mode at a field of 0.12 MV/cm, respectively. Dielectric breakdown of ZrN/TiO2/p-Si device was found to be 0.12 MV/cm in accumulation mode. Based on the C-V and I-V characteristics, the ZrN/TiO2/ZrN structure showed no variation in the capacitance value as the bias voltage was changed.