Effects of substrate temperatures on quality of BaO-SrO-ZnO- Nb_2O_5 thin films by RF-sputtering using Zn-enriched (Ba_(0.3)Sr_(0.7))(Zn_(1/3)Nb_(2/3))0_3 ceramic target

摘要

Effects of substrate temperatures on crystalline quality of BaO-SrO-ZnO-Nb_2O_5 thin films have been investigated in detail, which were fabricated on SiO_2 (110) substrates by radio frequency (RF) magnetron sputtering using a Zn-enriched (Ba_(0.3)Sr_(0.7)(Zn_(1/3)Nb_(2/3))0_3 target followed by annealing in Ar-O_2 atmosphere. The results reveal that all the samples are crack-free and compact with well-crystallized structures and only one chemical state is found for each spectrum of Ba, Nb, Sr, Zn and O photo-electron in the thin films. Both the grain sizes and the surface RMS roughness values of the thin films decrease with the increase in the substrate temperatures.