Effect of substrate temperature on the structural and optical properties of CdSe thin film deposited by electron beam evaporation technique

摘要

Electron beam evaporated CdSe thin films were deposited on the micro-slide glass substrates at different temperatures. Studies on the influence of substrate temperature on the structural, optical, electrical and morphological properties of CdSe films were carried out. X-ray diffraction analysis revealed that the deposited films belong to the hexagonal phase with preferred growth along (002) plane. The crystallite size of the film was decreased with increase in the substrate temperature up to 250 ℃. The optical transmittance spectra showed that the film deposited at room temperature and 350 ℃ acquired relatively high transmittance in the visible region. Spherical ball like structures were formed on the surface of the film deposited at 150 ℃ and were modified as flake like structures when the substrate temperature was 250 and 350 ℃. Surface of the film deposited at 450 ℃ contains elongated hillock like structures. Elemental analysis revealed that the film deposited at 350 ℃ is near stoichiometric ratio. Electrical measurement study reveals that electrical properties vary with substrate temperature.