Effect of mixed oxide/fluoride bonding on the dielectric properties of oxyfluoride glasses

摘要

The structural, elemental and dielectric properties have been examined for the glasses with composition 40SiO_2-30B_2O_3-(30-x:)CaO-xMnF_2 (x = 0, 10,20,30). XRD patterns show the amorphous nature of the samples. Density of the glasses is measured using the Archimedes' principle. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FTIR) are employed to reveal the local structural features of the glasses. Addition of MnF_2 leads to uniform chemical environment of the elements in the glass matrix. Strong affinity of fluoride ions with modifier ions leads to change the properties of these glasses. The effect of mixed fluoride and oxide bonds on the structure and dielectric properties is described. The lowest dielectric permittivity (～8) is observed when number of fluorine and oxygen ions of the modifiers (MnF_2 and CaO) is comparable. Nearly non-varying dielectric permittivity with temperature in these glasses is achieved, which can be exploited for high temperature microelectronic applications.