The influence of film composition and annealing temperature on the microstructure and magnetic properties of FeCo thin films

摘要

FeCo alloy films with different Fe, Co compositions were prepared by magnetron sputtering and subsequent annealing at different temperatures. The experimental results revealed the importance of Fe, Co composition and T_a on the microstructure and magnetic behavior for FeCo alloy films. With the increasing of Fe composition from 20 to 51%, the H_c of FeCo films increased gradually from 95 to 239 Oe. Iron silicide will form in the interface between FeCo films and Si substrate at high Fe composition and high T_a, which causes the decreasing of M_s from 1480 to 652 emu/cc in Fe_(36)Co_(64) films with increasing T_a from 400 to 700 °C.