Ultra-low temperature co-fired CaV_2O_6-glass composite ceramic substrate for microelectronics

摘要

Bivalent calcium metavanadate (CaV2O6) ceramic-glass composite substrates were fabricated using non-aqueous environmental friendly tape casting formulation. 3wt% of commercial glass was added to the calcined powder of CaV2O6 to achieve a sintering temperature of 650 degrees C which enables ultra-low temperature co-firing with aluminum electrode. An environmentally benign binder/solvent (Polypropylene carbonate/dimethyl carbonate) system was adopted to prepare the well dispersed slurry for tape casting. The crystal structure and co-fireability of the sintered substrate with Al was verified by X-ray diffraction technique. Thermal, dielectric and morphological analysis of the multilayer were analyzed. The room temperature thermal conductivity of CaV2O6-glass composite sintered at 650 degrees C is about 2.8W/mK. Sintered ceramics shows a relatively high linear coefficient of thermal expansion (CTE) of 11.46ppm/degrees C, which is favorable for co-firing with high CTE metallic materials. Microwave dielectric properties of CaV2O6-glass composite multilayer fired at 650 degrees C are epsilon(r)=10.6 and tan=3.19x10(-4)at 15GHz.