TeO_x Thin Films for Write-Once Optical Recording Media

摘要

TeO_x thin films were prepared by vacuum evaporation of TeO_2 powder. Structural characteristic and surface morphology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a two-component system comprising Te particles dispersed in an amorphous TeO_2 matrix. The dispersed Te particles were in a crystalline state. The TeO_2 films showed a finely granular structure and a rough surface. Results of the static recording test showed that the TeO_2 films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeO_2 films were suitable for using as a blue-green wavelength high density optical storage medium.