Epitaxial growth of PbZr_0.5ti_0.5O_3 thin films on SrRuO_3/SrTiO_3 substrates using chemical solution Deposition: Microstructural and ferroelectric properties

摘要

Epitaxial PbZr_0.5ti_0.5O_3 (PZT) thin films were grown on top of a SrRuO_3 epitaxial electrode layer on a (100) srtiO_3 substrate by the chemical solution deposition methkod at various temperatures. The microstructure of the PZT thin films was investigated by x-ray diffraction and transmission electron microscopy, and the ferroelectric properties were measured using the Ag/PZT/SRO capacitor structure.