Combined out-of-plane and in-plane texture control in thin films using ion beam assisted deposition

摘要

Complete control of the texture of a film during growth requires the ability to determine the in-plane and out-of-plane texture simultaneously. We present both computer simulation and experimental evidence for the simultaneous establishment of out-of-plane and in-plane texture during ion beam assisted deposition of aluminum. Channeling along <110> directions (60 from the normal) creates a {220} out-of-plane Orientation rather than the thermodynamically preferred {111} orientation. The ion Beam also aligned <220> directions within the plane of the film. Measured x-ray pole Figures confirmed the presence of a strong out of-plane texture and the presence of two Main, twin-related, in-plane texture components. We theoretically demonstrated that it Is impossible to completely control both the in-plane and out-of-plane texture with a Single ion beam in high-symmetry crystals and two ion beams must be employed to Ensure complete texture control.