...
机译:多层氮化硅硅集成光子平台和设备
Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada;
diffraction gratings; elemental semiconductors; integrated optics; optical couplers; optical losses; optical waveguides; silicon; silicon compounds; silicon-on-insulator; SiN-Si; SiN-on-SOI platforms; adiabatic tapers; line integration process flow; low-crosstalk waveguide crossings; low-loss interlayer transitions; low-loss waveguide crossings; multilayer silicon nitride-on-silicon integrated photonic platforms; polarization management devices; silicon-on-insulator integrated photonic platforms; telecommunication wavelength bands; ultra-broadband grating couplers; Loss measurement; Optical device fabrication; Optical losses; Optical waveguides; Silicon; Silicon compounds; Waveguide transitions; Bragg gratings; Silicon photonics; integrated optics; polarization; silicon photonics; waveguides;
机译:用于3-D光子电路和器件的单片集成多层氮化硅硅波导平台
机译:高级微铸造厂宣布光子集成电路的多层氮化硅 - 硅集成平台
机译:光子封装:将硅光子集成电路转变为光子器件
机译:用于三维集成光子器件和电路的多层硅氮化硅光子平台
机译:有源集成光子器件,位于单晶铌酸锂微片和混合硅锂铌酸盐平台中。
机译:用于下一代调制器的异构 - 集成光学相移器和硅光子平台上的开关:综述
机译:用于3-D光子电路和装置的单片集成多层氮化硅对硅波导平台
机译:用于集成光子学和硅光子学的3D active photonics晶体器件