Influence of preparation process on crystal structure and corrosion resistance of Fe-Hf-N soft magnetic thin films

摘要

The influence of the composition and preparation conditions on the corrosion resistance and the crystal structure of Fe-Hf-N soft magnetic thin films is studied to obtain a soft magnetic material with Bs over 1.5T. the best corrosion resistance was obtained for the Fe-Hf-N film, deposited in sputtering gas with 8 vol/100 N_2. In this case, the grain sizes of the Fe crystals in the film are small, which is supposed to be the main cause of the good corrosion resistance.