Microwave sintering of α/β-Si_3N_4

摘要

Dense silicon nitride from α- and β-Si_3N_4 powders with 6 wt/100 (Y_2O_3+Al_2O_3) additives were fabri- cated in a TE_103 single mode cavity microwave sintering system operating at 2.45 GHz. Packing powders were used. The sintering behaviour was investigated with special interest in t evolution of the α- to β-Si_3N_4 phase transformation, densifica- tion and microstructure development. Densities of about 96.7/100 TD and 95/100 TD were achieved by microwave sintering of α- and β-Si_3N_4 powders; the α to β conversion is more rapid than densification in the microwave heating of α-Si_3N_4.