Formation of step bunching in the epitaxial growth of SrRuO_3 thin films

摘要

The formation of step bunching in SrRuO_3 epitaxial films has been investigated by exploring the thickness dependence of the morphology. We have observed that pronounced step meandering in the thinner films modifies locally the terrace width. With subsequent growth, areas with double steps form and coexist with other having single steps. The areas with bunching grow and eventually coalesce. We will argue that adatom kinetics is the main driving force for step bunching nucleation.