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Growth of Co ultrathin films on MgO(001)

机译:在MgO(001)上生长Co超薄膜

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摘要

Cobalt ultrathin films with nominal thicknesses varying between 2 and 10 nm have been grown by DC sputtering process on MgO(001) substrate at room and high temperatures (650, 750 ℃). Transmission electron microscopy (TEM) has been used to study the crystallographic structure, strain and morphology of the Co films. The TEM images demonstrate the three-dimensional growth of cobalt at all temperatures, with only fcc structure in low thicknesses, and cobalt islands with hcp and fcc structure at greater layer thicknesses when the temperature is below 650 ℃. At 750 ℃ cobalt islands present only fcc structure for the whole studied thicknesses. The Co islands started to coalesce at nominal film thicknesses greater than 2 nm with pyramidal shape for hcp grains and flatter mesa shape for fee grains. Quantitative analysis of high resolution TEM micrographs reveal that whatever the temperature and thickness the Co lattice is relaxed.
机译:在室温和高温(650、750℃)下,通过直流溅射在MgO(001)衬底上生长了标称厚度在2至10 nm之间的钴超薄膜。透射电子显微镜(TEM)已用于研究Co膜的晶体结构,应变和形态。 TEM图像显示了在所有温度下钴的三维生长,在较低的厚度下只有fcc结构,而在温度低于650℃时,具有更大厚度的hcp和fcc结构的钴岛。在750℃时,钴的岛仅占整个研究厚度的fcc结构。 Co岛开始以大于2 nm的标称膜厚度合并,对于hcp晶粒为金字塔形,对于费用晶粒为较平坦的台面形状。高分辨率TEM显微照片的定量分析表明,无论温度和厚度如何,Co晶格都是松弛的。

著录项

  • 来源
    《Journal of Crystal Growth》 |2010年第9期|p.1636-1644|共9页
  • 作者单位

    CEMES-CNRS - 29, rue J. Marvig, B.P. 94347, F-31055 Toulouse Cedex, France;

    CEMES-CNRS - 29, rue J. Marvig, B.P. 94347, F-31055 Toulouse Cedex, France;

    Universite de Toulouse, INSA UPS, LPCNO, 135 avenue de Rangueil, F-31077 Toulouse, CNRS, LPCNO, F-31077 Toulouse, France;

    Universite de Toulouse, INSA UPS, LPCNO, 135 avenue de Rangueil, F-31077 Toulouse, CNRS, LPCNO, F-31077 Toulouse, France;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Nanostructures; A3. Physical vapor deposition processes; B1. Metals;

    机译:A1。纳米结构;A3。物理气相沉积过程;B1。金属制品;
  • 入库时间 2022-08-17 13:19:16

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