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首页> 外文期刊>Journal of Crystal Growth >Low-temperature growth of GaAs polycrystalline films on glass substrates for space solar cell application
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Low-temperature growth of GaAs polycrystalline films on glass substrates for space solar cell application

机译:用于太空太阳能电池的玻璃基板上GaAs多晶膜的低温生长

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摘要

Preliminary results of growth of gallium arsenide poly-crystalline films on quartz glass substrate are reported. The films were grown using chemical beam epitaxy apparatus at substrate temperatures varied between 400deg.C and 500deg.C The growth of polycrystalline GaAs has been realized at temperatures above 450deg.C. X-ray diffraction (XRD) and Raman Scattering show that the film grown at 500deg.C has good crystallinity.
机译:报道了在石英玻璃基板上生长砷化镓多晶膜的初步结果。使用化学束外延装置在400℃至500℃之间变化的衬底温度下生长膜。已经在高于450℃的温度下实现了多晶GaAs的生长。 X射线衍射(XRD)和拉曼散射表明,在500℃下生长的膜具有良好的结晶度。

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