The role of surface-tension-driven flow in the formation of a surface pattern on a Czochralski silicon melt

摘要

Spoke patterns on shallow silicon melts and polygonal cellular patterns on the surface of Czochralski (CZ) silicon melts were observed by CCD camera. The dark stripes of the spoke patterns in the CCD images indicate the lower temperatures. We found that the number of spokes depends on the depth of the silicon melt. When the thermocapillary flow in a 3-mm-deep silicon melt was dominant, a spoke pattern was clearly observe on the surface.