Research on the Passivation Function of Si_3N_4 Film to YBCO Superconducting Film

摘要

We made the high critical temperature superconducting film YBa_2Cu_3O_(7-δ) (YBCO) with wonderful properties by magnetic sputtering, and deposited Si_3N_4 protected covering on YBCO by microwave plasma Chemical Vapar Deposition (CVD) method and completed a moisture test to study this structure. The analysis of X-ray diffracting energy spectral of this structure had been made. The results showed that the Si_3N_4 film made no obviously influence on YBCO and the Si_3N_4 film had better passivation to water obviously.