Low‐pressure gas flow through a microsize channel

摘要

A theory is developed which predicts the mass flow rate, at low pressure, of an ideal gas through a microsize cylindrical channel. It is assumed that the gas flow is viscous, laminar, and compressible. Experiments are performed in which argon gas at various temperatures is passed through the Capillaritron Ion Source, whose interior geometry is consistent with the theory, and measurements are made of the mass flow rate. The experimental and theoretical flow rates are discussed, and then a comparison is made between these two. It is found that, on the average, the theory predicts the experimental flow rates to within 7.2%.