Finite element analysis and experimental study of surface acoustic wave propagation through two-dimensional pillar-based surface phononic crystal

摘要

We study both theoretically and experimentally the interaction of surface elastic waves with 2D surface phononic crystal (PnC) on a piezoelectric substrate. A rigorous analysis based on 3D finite element method is conducted to calculate the band structure of the PnC and to analyze the transmission spectrum (module and phase). Interdigital transducers (IDTs) are considered for electrical excitation and detection, and absorbing boundary conditions are used to suppress wave's reflection from the edges. The PnCs are composed of an array of 20 Nickel cylindrical pillars arranged in a square lattice symmetry, and deposited on a LiNbO3 substrate (128°Y cut-X propagating) between two dispersive IDTs. We investigate by means of band diagrams and transmission spectrum the opening band-gaps originating from pillars resonant modes and from Bragg band-gap. The physical parameters that influence and determine their appearance are also discussed. Experimental validation is achieved through electrical measurement of the transmission characteristics, including amplitude and phase.