Planar Hall Bead Array Counter Microchip With Nife/irmn Bilayers

摘要

The planar Hall effect (PHE) magnetic bead array countermicrochip integrating 24 of single sensors based on a simple NiFe/IrMn bilayer structure with a patterned size of 3 × 3 μm~2 has been fabricated and characterized. Single PHE sensors exhibit a sensitivity of about 2.5 mΩ/Oe. It was well applied for single Dynabeads~R M-280 detection, where one bead can induce a signal change, ΔV～2.2 mV, under the applied magnetic field of 20 Oe and a sensing current of 2 mA. This type of microchip is promising for quickly detecting and identifying multiple biological agents in the environment.