The sintering properties and interfacial investigation of barium ferrite and ceramic cofiring system for the application of LTCC technology

摘要

The BaFe_(12)O_(19) ferrite and BaTiO_3 ceramic nanoparticles were synthesized by sol-gel method, respectively. In order to involve the different functional materials and to improve the packaging density of devices using low temperature cofired ceramic technology, different content Bi_2O_3·B_2O_3·SiO_2·ZnO as the sintering additives were added to lower the sintering temperature at 920 ℃. The layers of BaFe_(12)O_(19) ferrite and BaTiO_3 ceramic prepared by tape casting were stocked alternately. The sintering properties and interfacial diffusion of cofired system were studied. Scanning electronic microscopy observation of the multilayer sample indicates obvious warp at the interface due to the sintering mismatch between ferrite and ceramic. The cofiring property of BaFe_(12)O_(19) and BaTiO_3 is modified by adjusting the composition of the slurry and a crack-free multilayer structure could be obtained. The results prove that this cofiring system could be used for the fabrication of broadband and high frequency of chip electronic components.