Temperature dependent junction capacitance-voltage characteristics of Ni embedded TiN/SiO_2/p-Si metal-insulator-semiconductor structure

摘要

This work presents the junction capacitance-voltage characteristics of highly textured/epitaxial Ni nanoparticle embedded in TiN matrix (TiN(Ni)) metal-insulator-semiconductor TiN(Ni)/SiO_2/p-Si (100) heterojunction in the temperature range of 10-300 K. This heterojunction behaves as metal-semiconductor junction with unavoidable leakage through native oxide SiO_2 layer. The clockwise hysteresis loop has been observed in the capacitance-voltage characteristics measured at various frequencies mainly due to presence of trap centers at the TiN(Ni)/SiO_2 interface and these are temperature dependent. The spin-dependent trap charge effect at the interface influences the quadratic nature of the capacitance with magnetic field. The junction magnetocapacitance (JMC) is observed to be dependent on both temperature and frequency. The highest JMC of this heterojunction has been observed at 200 K at higher frequencies (100kHz-1MHz). It is found that there is not much effect of band structure modification under magnetic field causing the JMC.