Defect-induced performance degradation of 4H-SiC Schottky barrier diode particle detectors

摘要

The formation and evolution of defects in 4H-SiC Schottky barrier diode high-energy particle detectors have been investigated and correlated with the detectors' properties. Low temperature annealing at 300 ℃ is found to significantly recover the charge collection efficiency as degraded by 1 MeV electron irradiation. At higher temperatures, an anneal-induced degradation in the detector's performance is observed. Current-voltage, capacitance-voltage, and deep level transient spectroscopy (DLTS) measurements are used to ascertain the effect of defects on the detector performance. The latter reveals that the DLTS defect levels, EH_1, and EH_3, are related to the initial recovery of the charge collection efficiency.