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Variation of dislocation etch-pit geometry: An indicator of bulk microstructure and recombination activity in multicrystalline silicon

机译:位错刻蚀坑几何形状的变化:多晶硅的整体微观结构和复合活性的指标

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摘要

Dislocation clusters in multicrystalline silicon limit solar cell performance by decreasing minority carrier diffusion length. Studies have shown that the recombination strength of dislocation clusters can vary by up to two orders of magnitude, even within the same wafer. In this contribution, we combine a surface-analysis approach with bulk characterization techniques to explore the underlying root cause of variations in recombination strength among different clusters. We observe that dislocation clusters with higher recombination strength consist of dislocations with a larger variation of line vector, correlated with a higher degree of variation in dislocation etch-pit shapes (ellipticities). Conversely, dislocation clusters exhibiting the lowest recombination strength contain mostly dislocations with identical line vectors, resulting in very similar etch-pit shapes. The disorder of dislocation line vector in high-recombination clusters appears to be correlated with impurity decoration, possibly the cause of the enhanced recombination activity. Based on our observations, we conclude that the relative recombination activity of different dislocation clusters in the device may be predicted via an optical inspection of the distribution and shape variation of dislocation etch pits in the as-grown wafer.
机译:多晶硅中的位错簇通过减小少数载流子扩散长度来限制太阳能电池的性能。研究表明,即使在同一晶片内,位错簇的复合强度也可以变化两个数量级。在这项贡献中,我们将表面分析方法与本体表征技术相结合,以探索不同簇之间复合强度变化的根本原因。我们观察到,具有较高重组强度的位错簇由线矢量变化较大的位错组成,与位错蚀刻坑形状(椭圆率)的变化程度较高相关。相反,表现出最低重组强度的位错簇大部分包含具有相同线向量的位错,从而导致非常相似的蚀刻坑形状。高重组簇中位错线向量的混乱似乎与杂质修饰相关,这可能是重组活性增强的原因。根据我们的观察,我们得出的结论是,可以通过对成膜晶圆中位错蚀刻坑的分布和形状变化进行光学检查来预测器件中不同位错簇的相对重组活性。

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  • 来源
    《Journal of Applied Physics》 |2014年第18期|183511.1-183511.7|共7页
  • 作者单位

    Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA;

    Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA;

    Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA;

    Karlstad University, Universitetsgatan 2, Karlstad SE-65188, Sweden;

    Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439, USA;

    Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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