Manipulating redox reaction during pulsed laser deposition

摘要

Copper and copper oxide thin films have been synthesized on (001) SrTiO_3 substrates using pulsed laser deposition. Three kinds of thin films can be achieved by changing deposition temperature and laser energy density: pure Cu, Cu:Cu_2O composite, and pure Cu_2O thin films. A phase diagram about the compositions of thin films has been represented and explained by redox reaction at the substrate surface during the deposition process. The present work represents a novel approach to further understand the surface reaction during deposition process and to fabricate oxide thin films with variable valence states using pulsed laser deposition.