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首页> 外文期刊>Journal of Applied Physics >Characteristics of microdomains and microdomain patterns recorded by electron beam irradiation on Y-cut LiNbO_3 crystals
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Characteristics of microdomains and microdomain patterns recorded by electron beam irradiation on Y-cut LiNbO_3 crystals

机译:Y切LiNbO_3晶体上电子束辐照记录的微区和微区图案的特征

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摘要

We present the results of investigations of planar domain patterns (isolated domains and domain gratings) fabricated by irradiation of the nonpolar Y-surface of LiNbO_3 crystals by an electron beam (EB) incident normally onto the surface. The EB recorded domains were investigated using atomic force microscopy, confocal second harmonic generation microscopy, and chemical etching as an auxiliary method. The dependence of the domain characteristics on irradiation conditions (acceleration voltage U, EB current I, and irradiation time t_(irr)) were determined. The length L_d of both isolated domains and domain gratings along the polar axis Z grows linearly with t_(irr) (at U, I = const) with no tending to saturation. The plots L_d(t_(irr)) obtained for U = 10 and 15 kV are practically identical, whereas the values of L_d for U = 5 kV are essentially lower. The domain thickness T_d along the Y-direction, i.e., the depth of the switched layer grows with acceleration voltage U. These results are discussed in terms of space-charge fields formation arising under EB irradiation of insulators. The linearity of L_d(t_(irr)) is accounted for by the frontal domain growth via the viscous friction law. The experimental dependence of T_d on U supports the suggestion that the domain thickness is determined by the penetration depth R_e of primary electrons, which in turn is governed by U. The difference in L_d(t_(irr)) plots for different U is accounted for by different electron emission σ. Indirect evidences of a defect structure modification in a thin surface layer with respect to the crystal bulk are obtained.
机译:我们介绍了通过垂直入射到表面的电子束(EB)照射LiNbO_3晶体的非极性Y表面而制造的平面畴图案(隔离畴和畴光栅)的研究结果。使用原子力显微镜,共焦二次谐波生成显微镜和化学蚀刻作为辅助方法研究了EB记录的域。确定了畴特性对照射条件(加速电压U,EB电流I和照射时间t_(irr))的依赖性。隔离磁畴和磁畴光栅沿极轴Z的长度L_d随t_(irr)线性增长(在U,I = const),并且没有趋于饱和的趋势。对于U = 10和15 kV获得的曲线L_d(t_(irr))实际上是相同的,而对于U = 5 kV而言,L_d的值实际上较低。沿Y方向的畴厚度T_d,即,开关层的深度随着加速电压U而增长。这些结果是根据在绝缘体的EB辐射下形成的空间电荷场来讨论的。 L_d(t_(irr))的线性由额域通过粘性摩擦定律的增长来解释。 T_d对U的实验依赖性支持以下建议:畴厚度由一次电子的穿透深度R_e决定,而穿透深度R_e又由U控制。不同U的L_d(t_(irr))曲线图的差异可解释为通过不同的电子发射σ。获得了相对于晶体块在薄表面层中缺陷结构改性的间接证据。

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  • 来源
    《Journal of Applied Physics》 |2015年第7期|072001.1-072001.7|共7页
  • 作者单位

    Institute of Microelectronics Technology and High Purity Materials of the Russian Academy of Sciences, 142432 Chernogolovka, Moscow Region, Russia;

    Institute of Crystallography of the Russian Academy of Sciences, 119333 Moscow, Russia;

    Moscow State Institute of Radio Engineering, Electronics and Automation, 119454 Moscow, Russia;

    Institute of Crystallography of the Russian Academy of Sciences, 119333 Moscow, Russia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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