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Cu impurity in insulators and in metal-insulator-metal structures: Implications for resistance-switching random access memories

机译:绝缘体和金属-绝缘体-金属结构中的铜杂质:电阻转换随机存取存储器的含义

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摘要

We present numerical results from atomistic simulations of Cu in SiO_2 and Al_2O_3, with an emphasis on the thermodynamic, kinetic, and electronic properties. The calculated properties of Cu impurity at various concentrations (9.91 × 10~(20)cm~(-3) and 3.41 × 10~(22)cm~(-3)) in bulk oxides are presented. The metal-insulator interfaces result in up to a ~4 eV reduction in the formation energies relative to the crystalline bulk. Additionally, the importance of Cu-Cu intraction in lowering the chemical potential is introduced. These concepts are then discussed in the context of formation and stability of localized conductive paths in resistance-switching Random Access Memories (RRAM-M). The electronic density of states and non-equilibrium transmission through these localized paths are studied, confirming conduction by showing three orders of magnitude increase in the electron transmission. The dynamic behavior of the conductive paths is investigated with atomistic drift-diffusion calculations. Finally, the paper concludes with a molecular dynamics simulation of a RRAM-M cell that attempts to combine the aforementioned phenomena in one self-consistent model.
机译:我们提供了在SiO_2和Al_2O_3中的Cu原子模拟的数值结果,重点是热力学,动力学和电子性质。给出了在体氧化物中各种浓度(9.91×10〜(20)cm〜(-3)和3.41×10〜(22)cm〜(-3))下Cu杂质的计算特性。金属-绝缘体界面导致形成能相对于晶体本体降低约4 eV。另外,介绍了Cu-Cu吸引在降低化学势中的重要性。然后,在电阻转换随机存取存储器(RRAM-M)中局部导电路径的形成和稳定性的背景下讨论这些概念。研究了通过这些局部路径的状态的电子密度和非平衡传输,通过显示出电子传输三个数量级的增加来确认传导。通过原子漂移扩散计算研究了导电路径的动态行为。最后,本文以RRAM-M单元的分子动力学模拟作为结束,该分子试图将上述现象结合到一个自洽模型中。

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  • 来源
    《Journal of Applied Physics》 |2015年第5期|054504.1-054504.10|共10页
  • 作者单位

    Emerging Memory Group, Process R&D, Micron Technology Inc., Boise, Idaho 83707-0006, USA;

    Emerging Memory Group, Process R&D, Micron Technology Inc., Boise, Idaho 83707-0006, USA;

    Emerging Memory Group, Process R&D, Micron Technology Inc., Boise, Idaho 83707-0006, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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