Deep levels in as-grown and electron-irradiated n-type GaN studied by deep level transient spectroscopy and minority carrier transient spectroscopy

摘要

Development of high performance GaN-based devices is strongly dependent on the possibility to control and understand defects in material. Important information about deep level defects is obtained by deep level transient spectroscopy and minority carrier transient spectroscopy on as-grown and electron irradiated n-type bulk GaN with low threading dislocation density produced by halide vapor phase epitaxy. One hole trap labelled H1 (E_v + 0.34eV) has been detected on as-grown GaN sample. After 2MeV electron irradiation, the concentration of H1 increases and at fluences higher than 5 × 10~(14)cm~(-2), a second hole trap labelled H2 is observed. Simultaneously, the concentration of two electron traps, labelled T1 (E_C - 0.12eV) and T2 (E_C - 0.23 eV), increases. By studying the increase of the defect concentration versus electron irradiation fluence, the introduction rate of T1 and T2 using 2 MeV- electrons was determined to be 7 × 10~(-3)cm~(-1) and 0.9 cm~(-1), respectively. Due to the low introduction rate of Tl, it is suggested that the defect is associated with a complex. The high introduction rate of trap H1 and T2 suggests that the defects are associated with primary intrinsic defects or complexes. Some deep levels previously observed in irradiated GaN layers with higher threading dislocation densities are not detected in present investigation. It is therefore suggested that the absent traps may be related to primary defects segregated around dislocations.