Role of geometry on the frequency spectra of U-shaped atomic force microscope probes

摘要

Contact resonance atomic force microscopy (CR-AFM) is a specific technique that is used to determine elastic or viscoelastic properties of materials. The success of this technique is highly dependent on the accuracy of frequency spectra that must be measured for both noncontact and the case in which the tip is in contact with the sample of interest. Thus, choosing the right probe is crucial for accurate experiments. U-shaped probes also offer new opportunities for CR-AFM measurements because of certain specific modes that have tip motion parallel to the sample surface such that these resonances can access in-plane sample properties. However, analysis of the spectra from U-shaped probes is much more challenging due to these modes. The geometiy of these probes is the main driver for the spectral response. Here, this influence on the resonance frequencies of the commercially fabricated U-shaped probe AN2-300 is evaluated with respect to geometry in terms of leg width, crossbeam width, and crossbeam length. Both noncontact and contact cases are examined with respect to variations of the nominal geometry. An energy distribution approach is also presented to assist with the identification of modes that have close resonances. Finally, this analysis allows recommendations to be made in order to minimize the convergence of multiple resonances for a specific range of measurement parameters.