Photochemical deposition of ZnS from the gas phase and simultaneous luminescence detection of photofragments from a single-source precursor, Zn(S_2COCHMe_2)_2

摘要

ZnS thin films are made by laser driven chemical vapor deposition (CVD) from a single-source precursor, Zn(S_2COCHMe_2)_2 under vacuum conditions. Photofragments in the gas phase are identified simultaneously by luminescence spectroscopy. The laser selectively activates the initial decomposition of the precursor and drives its conversion to the desired materials under mild conditions. These photolytically produced films are compared to films made by thermal deposition from the same precursor.