Direct Scanning Electron Microscopy Imaging of Ferroelectric Domains After Ion Milling

摘要

A method for directly observing the ferroelectric domain structure by scanning electron microscopy after argon ion milling has been established. Its advantages are exemplified by exposing the domain structure in three widely used ferroelectric ceramics, BaTiO_3, (Na,K)NbO_3, and Pb(Ti,Zr)O_3. Stable high-resolution images revealing domains with widths <30 nm have been obtained. The domain contrast is caused by electron channeling and is strongly dependent on the sample tilt angle. Owing to a strain- and defect-free surface generated by gentle ion milling, pronounced orientation contrast is observed.