Indium oxide and indium-tin-oxide channel ferroelectric gate thin film transistors with yttrium doped hafnium-zirconium dioxide gate insulator prepared by chemical solution process

摘要

Ferroelectric gate transistor (FGT) with yttrium doped hafnium-zirconium dioxide (Y-HZO) gate insulator and oxide channel with various thicknesses of In2O3 and ITO were fabricated by chemical solution deposition. First, ferroelectric properties of Y-HZO in the metal-ferroelectric-semiconductor structure with 5-22 nm thick In2O3 and 6-24 nm thick ITO, have been confirmed by polarization-voltage and capacitance-voltage (C-V) characteristics. The C-V curves showed clear butterfly loops showing the depletion of In2O3 and ITO layer. Secondly, the device performance of FGTs has been evaluated with various thicknesses of In2O3 and ITO channel layer. The fabricated FGTs exhibited typical n-channel transistor operation with a counterclockwise hysteresis loop due to the ferroelectric nature of the Y-HZO-gate insulator. It was found that FGT shows a low subthreshold voltage swing, high on/off drain current ratio of 10(6), large on current, and memory window. (c) 2021 The Japan Society of Applied Physics