A review on the latest progress of visible GaN-based VCSELs with lateral confinement by curved dielectric DBR reflector and boron ion implantation

摘要

This review introduces the latest progress on gallium nitride (GaN)-based visible vertical-cavity surface-emitting lasers (VCSELs) with features such as plane and curved distributed Bragg reflectors (DBRs) made of dielectric materials and boron ion implantation to form current apertures. This novel class of GaN-based VCSELs allow small apertures down to 3 mu m and long cavities of more than 20 mu m without the occurrence of diffraction loss. These structures have enabled low threshold currents (e. g., I-th = 0.25 mA), high efficiency operation (e. g., WPE = 9.5%), and robust fabrication processes with high lasing yield. All those characteristics are the best among those previously reported GaN-based VCSELs. The proposed structure should facilitate the production of VCSELs formed on semi-polar plane GaN substrates and arrayed VCSELs, which are expected to realize novel light emitters that have been previously difficult to fabricate, such as green VCSELs and watt-class blue VCSEL arrays. (C) 2019 The Japan Society of Applied Physics