High mobility (>30cm~2V~(-1)s~(-1)) and low source/drain parasitic resistance In-Zn-O BEOL transistor with ultralow <10-20 A /μm~(-1) off-state leakage current

摘要

We have demonstrated and experimentally verified the advantages of the In-Zn-O (InZnO) channel compared with the In-Ga-Zn-O (InGaZnO) channel for a high-performance oxide semiconductor channel field-effect transistor (FET) with both ultralow off-state leakage current and high on-current. Compared with the InGaZnO FET, high mobility (30 cm(2)V(-1)s(-1)) and a reduction of source/drain (S/D) parasitic resistance by 75% were achieved by the InZnO FET. Analysis of the Schottky barrier height at the S/D contact and the band offset between the oxide semiconductor channel and gate insulator SiO2 revealed that the reduction of S/D parasitic resistance originates from the lowering of the conduction band minimum by the InZnO channel. Moreover, ultralow (10(-20) A mu m(-1)) off-state leakage current characteristics including not only S/D leakage current but also gate leakage current were confirmed to be maintained even with a thin gate insulator with an equivalent oxide thickness of 6.2 nm. (C) 2019 The Japan Society of Applied Physics