Piezo- and Ferroelectric Properties of Self-Assembled PbTiO_3 Nanoisland Structures Fabricated by Metalorganic Chemical Vapor Deposition

摘要

Self-assembled PbTiO_3 nanoisland structures were fabricated on Pt/SiO_2/Si at 400℃ by metalorganic chemical vapor deposition. The average width and height were 35 and 1.9 nm for PbTiO_3 grown for 10s, and 35 and 3.6 nm for that grown for 20 s, respectively. In-plane X-ray diffraction showed that PbTiO_3 nanoisland structures had a tetragonal structure and only c-domains. Piezoresponse force microscopy revealed that the piezoresponse signal decreased with a decrease in the height of nanoisland structures. The minimum height and width of PbTiO_3 nanoisland structures showing a piezoelectric hysteresis loop were 1.2 and 27 nm, respectively.