Electrical Resistivity of Carbon Micro Coil Measured by a Multi-Probe Unit Installed in a Scanning Electron Microscope

摘要

We have done four-terminal resistance measurement of a carbon micro-coil (CMC) using a multi-probe unit installed in a scanning electron microscope (SEM). With minimizing a charging effect of specimens for SEM observation, we have kept sufficient electrical insulation between the sample and the substrate. CMC shows an ohmic conduction and has a resistivity value of about 1.5 x 10~(-4) Ω m at room temperature. This resistivity measurement method will be applicable to other micro-scale samples.