Generation of Long and High-Density Plasma Column Using Metal-Antenna Surface Wave-Excited Plasma Source

摘要

We investigated the effect of gas pressure on the length of a microwave-excited high-density plasma column sustained along a graphite rod (25 cm in length and 1.0 cm in diameter), which was negatively biased against a grounded chamber. It was confirmed that the length of the overdense ( > 10~(11) cm~(-3)) plasma column increased with increasing gas pressure and negative voltage. At a gas pressure of 33 Pa, we obtained the longest plasma column covering the entire surface of the rod with a negative voltage of -150 V and an input microwave power of 100 W.