Plasma distribution in a planar-type surface wave-excited plasma source

摘要

The electromagnetic fields and plasma parameters were studied in an azimuthally symmetric planar-type SWP source employing multi-ring slot antenna (MRSA), by using a two-dimensional numerical simulation based on the finite-difference time-domain (FDTD) approximation to Maxwell's equations self-consistently coupled with a fluid model for plasma evolution. The calculation was conducted for different four types of MRSA consisting of six coaxial metal rings implanted in a dielectric plate. It was shown that the radial uniformity of plasma is remarkably improved by varying the axial thickness of the six rings with location; the most uniform plasma distribution was obtained for the MRSA with the center two rings 0.25 cm in thickness and outlying four rings 1.6 cm in thickness.