Development of an Angle Calibration System with a Combined Silicon Polygon and Angle Interferometer

摘要

We developed a new angle calibration system combining a pure silicon crystal in a natural state and an angle interferometer with a wide span of rotation. The uncertainty in the angle of the six-faced silicon polygon is approximately 10~(-8) rad (0.004″), and the angle resolution of the angle interferometer is 0.005″. We evaluated the performance of the angle calibration system and summarized its budget of uncertainty. The uncertainty of the system was estimated to be ± 0.07″ (k = 2). To demonstrate the new calibration system, we used it to measure the angle error of an index table, and we compared the results with existing calibration methods.